In order to realize new device concepts and to improve and extend our current devices portfolio we investigate and develop novel materials. One significant focus is the growth of high purity as well as intentionally doped single-crystalline diamond layers for use in quantum technologies: For example, as single photon sources, high-resolution magnetic field probes, as basis for spin-qubit quantum gates operating at room temperature, or for future power electronic devices. Furthermore, we concentrate on optimizing nanocrystalline diamond layers, graphene and Aluminum Scandium Nitride (AlScN) as an emerging piezoelectric material, which we also produce by metal organic chemical vapor deposition (MOCVD).